How to do instantaneous mode switching with servo motors
Robotics Business Review
DECEMBER 26, 2023
Spin rinse dryer (SRD) systems for wafers Spin rinse dryers (SRDs) clean and dry semiconductor wafers in a series of cycles that include rinsing, purging, and drying the wafers. A cassette holding a rack of wafers is loaded into the rotor inside the SRD chamber. The SRD system for wafer cleaning.
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